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Browsing by Author "Hattrick-Simpers, J."

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    Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks

    Green, M.L.
    ;
    Chang, Shou-Zen
    ;
    De Gendt, Stefan  
    ;
    Schram, Tom  
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    Hattrick-Simpers, J.
    Journal article
    2007-09, Microelectronic Engineering, (84) 9_10, p.2209-2212
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    Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

    Chang, K.S.
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    Green, M.L.
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    Suehle, J.
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    Hattrick-Simpers, J.
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    Takeuchi, I.
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    Ohmori, K.
    ;
    Chikyow, T.
    Meeting abstract
    2008, 213th ECS Meeting, 18/05/2008, p.712
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    Combinatorial methodology for the exploration of metal gate electrodes on HfO2 for the advanced gate stack

    Chang, Kao-Shuo
    ;
    Green, M.L.
    ;
    Suehle, J.
    ;
    Hattrick-Simpers, J.
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    Takeuchi, I.
    ;
    Ohmori, K.
    ;
    Chikyow, T.
    Proceedings paper
    2008, Dielectrics for Nanosystems 3: Materials Science, Processing, Reliability, and Manufacturing, 18/05/2008, p.151-159

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