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Articles
Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
Publication:
Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
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Date
2007
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Green, M.L.
;
Chang, Shou-Zen
;
De Gendt, Stefan
;
Schram, Tom
;
Hattrick-Simpers, J.
Journal
Microelectronic Engineering
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1913
since deposited on 2021-10-16
Acq. date: 2026-07-16
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Views
1913
since deposited on 2021-10-16
Acq. date: 2026-07-16
Citations