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Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
Publication:
Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
Date
2007-09
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Green, M.L.
;
Chang, Shou-Zen
;
De Gendt, Stefan
;
Schram, Tom
;
Hattrick-Simpers, J.
Journal
Microelectronic Engineering
Abstract
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1910
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations
Metrics
Views
1910
since deposited on 2021-10-16
Acq. date: 2025-10-23
Citations