Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks

dc.contributor.author	Green, M.L.
dc.contributor.author	Chang, Shou-Zen
dc.contributor.author	De Gendt, Stefan
dc.contributor.author	Schram, Tom
dc.contributor.author	Hattrick-Simpers, J.
dc.contributor.imecauthor	De Gendt, Stefan
dc.contributor.imecauthor	Schram, Tom
dc.contributor.orcidimec	De Gendt, Stefan::0000-0003-3775-3578
dc.date.accessioned	2021-10-16T16:23:34Z
dc.date.available	2021-10-16T16:23:34Z
dc.date.issued	2007-09
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/12227
dc.source.beginpage	2209
dc.source.endpage	2212
dc.source.issue	9_10
dc.source.journal	Microelectronic Engineering
dc.source.volume	84
dc.title	Application of combinatorial methodologies for work function engineering of metal gate/high-k advanced gate stacks
dc.type	Journal article
dspace.entity.type	Publication
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