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Browsing by Author "Hauptmann, Marc"

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    Bubble size distribution analysis and control in high frequency ultrasonic cleaning processes

    Hauptmann, Marc
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    Struyf, Herbert  
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    Mertens, Paul  
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    Heyns, Marc  
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    De Gendt, Stefan  
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    Glorieux, Christ
    Proceedings paper
    2012, International Symposium on Ultrasound in the Control of Industrial Processes - UCIP, 18/04/2012, p.12016
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    Enhancement of acoustic heating during nucleation of acoustic cavitation inside an ultrasonic reactor cavity

    Hauptmann, Marc
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    Brems, Steven  
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    Camerotto, Elisabeth  
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    Xu, XiuMei  
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    Struyf, Herbert  
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    Mertens, Paul  
    Proceedings paper
    2010, 20th International Congress on Acoustics - ICA, 23/08/2010, p.1-8
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    Enhancement of cavitation activity and particle removal with pulsed high frequency ultrasound and supersaturation

    Hauptmann, Marc
    ;
    Frederickx, Floris
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    Struyf, Herbert  
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    Mertens, Paul  
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    Heyns, Marc  
    Journal article
    2013, Ultrasonics Sonochemistry, (20) 1, p.69-76
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    Evaluation and interpretation of bubble size distributions in pulsed megasonic fields

    Hauptmann, Marc
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    Struyf, Herbert  
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    De Gendt, Stefan  
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    Glorieux, Christ
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    Brems, Steven  
    Journal article
    2013, Journal of Applied Physics, (113) 18, p.184902
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    Impact of acoustical reflections on megasonic cleaning performance

    Brems, Steven  
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    Hauptmann, Marc
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    Camerotto, Elisabeth  
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    Pacco, Antoine  
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    Halder, Sandip  
    Proceedings paper
    2009, Cleaning and Surface Conditioning Technology in Semiconductor Device Manufacturing 11, 4/10/2009, p.287-294
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    Impact of acoustical reflections on megasonic cleaning performance

    Brems, Steven  
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    Hauptmann, Marc
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    Camerotto, Elisabeth  
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    Pacco, Antoine  
    ;
    Halder, Sandip  
    Meeting abstract
    2009, 216th ECS Meeting, 4/10/2009, p.2089
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    Importance of bubble size control in ultrasonic surface cleaning by pulsed high-frequency soundfields

    Hauptmann, Marc
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    Struyf, Herbert  
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    De Gendt, Stefan  
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    Glorieux, Christ
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    Brems, Steven  
    Journal article
    2014, ECS Journal of Solid State Science and Technology, (3) 1, p.N3032-N3040
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    Influence of dissolved CO2 on bubble activity in pulsed acoustic fields

    Brems, Steven  
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    Hauptmann, Marc
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    Camerotto, Elisabeth  
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    Pacco, Antoine  
    ;
    Struyf, Herbert  
    Proceedings paper
    2013, Ultra Clean Processing of Semiconductor Surfaces XI - UCPSS, 17/09/2012, p.177-180
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    Influence of gas type on ultrasound cleaning efficiency

    Brems, Steven  
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    Camerotto, Elisabeth  
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    Hauptmann, Marc
    ;
    Kim, Tae-Gon
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    Struyf, Herbert  
    Meeting abstract
    2010, 20th International Congress on Acoustics - ICA, 23/08/2010, p.83
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    Influence of gasification on electro-acoustical and cleaning performance of a 1 MHz nozzle system in megasonic cleaning

    Hauptmann, Marc
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    Brems, Steven  
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    Camerotto, Elisabeth  
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    Zijlstra, Aaldert
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    Doumen, Geert  
    Meeting abstract
    2009, 35th International Conference on Micro & Nano Engineering - MNE, 28/09/2009
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    Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

    Hauptmann, Marc
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    Brems, Steven  
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    Camerotto, Elisabeth  
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    Zijlstra, Aaldert
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    Doumen, Geert  
    Journal article
    2010, Microelectronic Engineering, (87) 5_8, p.1512-1515
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    Influence of surface tension on cavitation noise spectra and particle removal efficiency in high frequency ultrasound fields

    Camerotto, Elisabeth  
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    Brems, Steven  
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    Hauptmann, Marc
    ;
    Pacco, Antoine  
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    Struyf, Herbert  
    Journal article
    2012, Journal of Applied Physics, (112) 11, p.114322
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    Nanoparticle removal with megasonics: A review

    Brems, Steven  
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    Hauptmann, Marc
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    Camerotto, Elisabeth  
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    Pacco, Antoine  
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    Kim, Tae-Gon
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    Xu, XiuMei  
    Journal article
    2014, ECS Journal of Solid State Science and Technology, (3) 1, p.N3010-N3014
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    Optimizing high frequency ultrasound cleaning in the semiconductor industry

    Brems, Steven  
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    Hauptmann, Marc
    ;
    Camerotto, Elisabeth  
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    Struyf, Herbert  
    ;
    Mertens, Paul  
    Proceedings paper
    2012, 8th International Symposium on Cavitation - CAV, 14/08/2012, p.236
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    Physical forces exerted by microbubbles on a surface in a traveling wave field

    Brems, Steven  
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    Hauptmann, Marc
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    Camerotto, Elisabeth  
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    Mertens, Paul  
    ;
    Heyns, Marc  
    Journal article
    2014, Ultrasonics, (54) 2, p.706-709
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    Removal of nanoparticles from surfaces using ultrasound at megahertz frequencies

    Hauptmann, Marc
    PHD thesis
    2012-12
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    Sonoluminescence - a crucial step towards Sonoplasma applications

    Camerotto, Elisabeth  
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    Brems, Steven  
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    Hauptmann, Marc
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    Mertens, Paul  
    ;
    Shamiryan, Denis
    Oral presentation
    2010, 10th Flemish Youth Conference of Chemistry
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    Stroboscopic Schlieren study of bubble formation during megasonic agitation

    Hauptmann, Marc
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    Brems, Steven  
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    Camerotto, Elisabeth  
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    Mertens, Paul  
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    Heyns, Marc  
    Journal article
    2012, Solid State Phenomena, 187, p.185-192
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    Stroboscopic Schlieren study of bubble formation during megasonic agitation

    Hauptmann, Marc
    ;
    Brems, Steven  
    ;
    Camerotto, Elisabeth  
    ;
    Mertens, Paul  
    ;
    Heyns, Marc  
    Meeting abstract
    2010, 10th International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 19/09/2010, p.P1.3
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    The importance of cavitation hysteresis in megasonic cleaning

    Camerotto, Elisabeth  
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    De Gendt, Stefan  
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    Hauptmann, Marc
    ;
    Shamiryan, Denis
    ;
    Heyns, Marc  
    Meeting abstract
    2010, 10th International Symposium on Ultra-Clean Processing of Semiconductor Devices - UCPSS, 19/09/2010, p.29-30
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