Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

Publication:

2010

Journal article

Author(s)

Hauptmann, Marc

;

;

;

Zijlstra, Aaldert

;

;

Bearda, Twan

;

;

Lauriks, Walter

Microelectronic Engineering

1926 since deposited on 2021-10-18

Acq. date: 2026-02-26