Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning

dc.contributor.author	Hauptmann, Marc
dc.contributor.author	Brems, Steven
dc.contributor.author	Camerotto, Elisabeth
dc.contributor.author	Zijlstra, Aaldert
dc.contributor.author	Doumen, Geert
dc.contributor.author	Bearda, Twan
dc.contributor.author	Mertens, Paul
dc.contributor.author	Lauriks, Walter
dc.contributor.imecauthor	Brems, Steven
dc.contributor.imecauthor	Camerotto, Elisabeth
dc.contributor.imecauthor	Doumen, Geert
dc.contributor.imecauthor	Mertens, Paul
dc.contributor.orcidimec	Brems, Steven::0000-0002-0282-8528
dc.date.accessioned	2021-10-18T16:57:27Z
dc.date.available	2021-10-18T16:57:27Z
dc.date.issued	2010
dc.identifier.issn	0167-9317
dc.identifier.uri	https://imec-publications.be/handle/20.500.12860/17238
dc.source.beginpage	1512
dc.source.endpage	1515
dc.source.issue	5_8
dc.source.journal	Microelectronic Engineering
dc.source.volume	87
dc.title	Influence of gasification on the performance of a 1 MHz nozzle system in megasonic cleaning
dc.type	Journal article
dspace.entity.type	Publication
Files
Publication available in collections:	Articles

Date