Browsing by Author "Hautala, John"
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Publication SOI thickness uniformity improvement using corrective etching for silicon nano-photonic device
Proceedings paper2011-09, 8th International Conference in Group IV Photonics, 14/09/2011, p.71-73Publication SOI thickness uniformity improvement using wafer-scale corrective etching for silicon nano-photonic device
Proceedings paper2011, Proceedings of the Annual Symposium of the IEEE Photonics Benelux Chapter, 1/12/2011, p.289-292