Browsing by Author "He, Yuan"

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Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography

Ma, Yuansheng
;
Lei, Junjiang
;
Torres, J. Andres
;
Hong, Le
;
Word, James
;
Fenger, Germain
Proceedings paper
2015, Alternative Lithographic Technologies VII, 22/02/2015, p.942306
Directed self-assembly graphoepitaxy template generation with immersion lithography

Ma, Yuansheng
;
Lei, Junjiang
;
Torres, J. Andres
;
Hong, Le
;
Word, James
;
Fenger, Germain
Journal article
2015, Journal of Micro/Nanolithography MEMS and MOEMS, (14) 3, p.31216