Publication:

Directed self-assembly graphoepitaxy template generation with immersion lithography

Date

2015
Journal article
https://doi.org/10.1117/1.JMM.14.3.031216
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Author(s)

Ma, Yuansheng
;
Lei, Junjiang
;
Torres, J. Andres
;
Hong, Le
;
Word, James
;
Fenger, Germain
;
Tritchkov, Alexander
;
Lippincott, George
;
Gupta, Rachit
;
Lafferty, Neal
;
He, Yuan
;
Bekaert, Joost  
;
Vandenberghe, Geert  

Journal

Journal of Micro/Nanolithography MEMS and MOEMS

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1950 since deposited on 2021-10-22
Acq. date: 2025-10-23

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1950 since deposited on 2021-10-22
Acq. date: 2025-10-23

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