Publication:

Directed self-assembly graphoepitaxy template generation with immersion lithography

Date

2015
Journal article
https://doi.org/10.1117/1.JMM.14.3.031216
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dc.contributor.authorMa, Yuansheng
dc.contributor.authorLei, Junjiang
dc.contributor.authorTorres, J. Andres
dc.contributor.authorHong, Le
dc.contributor.authorWord, James
dc.contributor.authorFenger, Germain
dc.contributor.authorTritchkov, Alexander
dc.contributor.authorLippincott, George
dc.contributor.authorGupta, Rachit
dc.contributor.authorLafferty, Neal
dc.contributor.authorHe, Yuan
dc.contributor.authorBekaert, Joost
dc.contributor.authorVandenberghe, Geert
dc.contributor.imecauthorBekaert, Joost
dc.contributor.imecauthorVandenberghe, Geert
dc.contributor.orcidimecBekaert, Joost::0000-0003-3075-3479
dc.date.accessioned2021-10-22T20:45:48Z
dc.date.available2021-10-22T20:45:48Z
dc.date.issued2015
dc.identifier.doi10.1117/1.JMM.14.3.031216
dc.identifier.issn1932-5150
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/25589
dc.source.beginpage31216
dc.source.issue3
dc.source.journalJournal of Micro/Nanolithography MEMS and MOEMS
dc.source.volume14
dc.title

Directed self-assembly graphoepitaxy template generation with immersion lithography

dc.typeJournal article
dspace.entity.typePublication
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