Publication:

Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography

Date

2015

Proceedings Paper

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Files

30395.pdf 2.08 MB

Author(s)

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Torres, J. Andres

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Fenger, Germain

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Tritchkov, Alexander

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Lippincott, George

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Vandenberghe, Geert

Statistics

1965 since deposited on 2021-10-22

Acq. date: 2026-02-25