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Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography
Publication:
Directed self-assembly (DSA) grapho-epitaxy template generation with immersion lithography
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Date
2015
Proceedings Paper
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30395.pdf
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Ma, Yuansheng
;
Lei, Junjiang
;
Torres, J. Andres
;
Hong, Le
;
Word, James
;
Fenger, Germain
;
Tritchkov, Alexander
;
Lippincott, George
;
Gupta, Rachit
;
Lafferty, Neal
;
He, Yuan
;
Bekaert, Joost
;
Vandenberghe, Geert
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1965
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Acq. date: 2025-12-11
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Views
1965
since deposited on 2021-10-22
2
last month
1
last week
Acq. date: 2025-12-11
Citations