Browsing by Author "Henrichsen, Henrik"
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Publication In-line sheet resistance measurements of nanometer-wide semiconducting fins
Proceedings paper2017, International Conference on Frontiers of Characterization and Metrology for Nanoelectronics - FCMN, 21/03/2017Publication Sheet-resistance measurements in nanometer-wide conductive lines
Meeting abstract2017, EMRS Spring Meeting Symposium S: Analytical Techniques for Precise Characterization of Nano Materials - ALTECH, 22/05/2017, p.S 6.4Publication Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
Journal article2018, Physica Status Solidi A, (215) 6, p.1700857Publication Zero and one-dimensional electrical characterization of nanometer-wide Si fins
Meeting abstract2018, 22nd International Conference on Ion Implantation Technology - IIT, 16/09/2018