Publication:

Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe

Date

2018

Journal article

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Author(s)

Bogdanowicz, Janusz

;

Folkersma, Steven

;

Sergeant, Stefanie

;

Schulze, Andreas

;

;

Petersen, Dirch

;

;

Henrichsen, Henrik

;

;

Vandervorst, Wilfried

Journal

Physica Status Solidi A

Statistics

2042 since deposited on 2021-10-25

Acq. date: 2026-02-28