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Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
Publication:
Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
Date
2018
Journal article
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Folkersma, Steven
;
Sergeant, Stefanie
;
Schulze, Andreas
;
Moussa, Alain
;
Petersen, Dirch
;
Hansen, Ole
;
Henrichsen, Henrik
;
Nielsen, Peter
;
Vandervorst, Wilfried
Journal
Physica Status Solidi A
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2039
since deposited on 2021-10-25
Acq. date: 2025-10-24
Citations
Metrics
Views
2039
since deposited on 2021-10-25
Acq. date: 2025-10-24
Citations