Skip to content
Institutional repository
Communities & Collections
Browse all items
Scientific publications
Open knowledge
Log In
imec Publications
Articles
Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
Publication:
Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe
Copy permalink
Date
2018
Journal article
Simple item page
Full metadata
Statistics
Loading...
Loading...
Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Bogdanowicz, Janusz
;
Folkersma, Steven
;
Sergeant, Stefanie
;
Schulze, Andreas
;
Moussa, Alain
;
Petersen, Dirch
;
Hansen, Ole
;
Henrichsen, Henrik
;
Nielsen, Peter
;
Vandervorst, Wilfried
Journal
Physica Status Solidi A
Abstract
Description
Metrics
Views
2042
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-10
Citations
Metrics
Views
2042
since deposited on 2021-10-25
1
last month
Acq. date: 2025-12-10
Citations