Publication:

Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe

Date

2018
Journal article
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dc.contributor.authorBogdanowicz, Janusz
dc.contributor.authorFolkersma, Steven
dc.contributor.authorSergeant, Stefanie
dc.contributor.authorSchulze, Andreas
dc.contributor.authorMoussa, Alain
dc.contributor.authorPetersen, Dirch
dc.contributor.authorHansen, Ole
dc.contributor.authorHenrichsen, Henrik
dc.contributor.authorNielsen, Peter
dc.contributor.authorVandervorst, Wilfried
dc.contributor.imecauthorBogdanowicz, Janusz
dc.contributor.imecauthorFolkersma, Steven
dc.contributor.imecauthorSergeant, Stefanie
dc.contributor.imecauthorMoussa, Alain
dc.contributor.imecauthorVandervorst, Wilfried
dc.contributor.orcidimecBogdanowicz, Janusz::0000-0002-7503-8922
dc.contributor.orcidimecSergeant, Stefanie::0000-0001-9923-0903
dc.date.accessioned2021-10-25T16:49:01Z
dc.date.available2021-10-25T16:49:01Z
dc.date.issued2018
dc.identifier.issn1862-6300
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/30280
dc.identifier.urlhttp://onlinelibrary.wiley.com/doi/10.1002/pssa.201700857/abstract;jsessionid=4B590B8573913545910A4BBD2F57931E.f01t03
dc.source.beginpage1700857
dc.source.issue6
dc.source.journalPhysica Status Solidi A
dc.source.volume215
dc.title

Width-dependent sheet resistance of nanometer-wide Si fins as measured with micro four-point probe

dc.typeJournal article
dspace.entity.typePublication
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