Browsing by Author "Hey, P."
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Publication Rapid thermal anealing of electro chemically plated Cu films
Proceedings paper2000, Advanced Metallization Conference 1999 - AMC 1999, 28/09/1999, p.167-171Publication Rapid thermal annealing of electro chemically plated Cu films
Oral presentation1999, Advanced Metallization Conference; September 28-30, 1999; Orlando, FL, USA.