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Conference contributions
Rapid thermal anealing of electro chemically plated Cu films
Publication:
Rapid thermal anealing of electro chemically plated Cu films
Date
2000
Proceedings Paper
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Basic data
APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Beyer, Gerald
;
Kitabijan, P.
;
Brongersma, Sywert
;
Proost, Joris
;
Bender, Hugo
;
Richard, Emmanuel
;
Vervoort, Iwan
;
Hey, P.
;
Zhang, P.
;
Maex, Karen
Journal
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1947
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations
Metrics
Views
1947
since deposited on 2021-10-14
Acq. date: 2025-10-23
Citations