Browsing by Author "Hideaki, Iino"
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Publication Challenges and solutions of replacement metal gate patterning to enable gate-all-around device scaling
; ; ; ; ; Proceedings paper2021, International Symposium on Ultra Clean Processing of Semiconductor Surfaces - UCPSS, 22/09/2020, p.119-126Publication Cobalt pre-metallization clean and functional water rinse in BEOL interconnect
Meeting abstract2019, Surface Preparation and Cleaning Conference (SPCC 2019), 2/04/2019Publication Functional water solutions to enable wet cleaning process for leading edge semiconductor device manufacturing
Meeting abstract2019, The Surface Preparation and Cleaning Conference (SPCC) 2019, 1/04/2019Publication Study on La2O3 wet clean by pH controlled functional water
Meeting abstract2019, ECS Fall Meeting G01-16th International Symposium on Semiconductor Cleaning Science and Technology (SCST 16), 13/10/2019, p.1094Publication Wetting of deep hydrophilic nanoholes by aqueous solutions
Meeting abstract2020, SPCC - Surface Preparation and Cleaning Conference, 31/08/2020