Browsing by Author "Higgins, Craig"
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Publication Hotspot discovery and variability analysis for advanced EUV processes
;Sah, Kaushik ;Chen, Zhijin ;Zhang, Yao ;Zhang, Liming ;Zhang, Cao ;Higgins, CraigBurov, AnatolyProceedings paper2024, Conference on Metrology, Inspection, and Process Control XXXVIII, FEB 26-29, 2024, p.Art. 129553H