Publication:

Wafer Edge Defectivity and Its Correlation to Process Parameters

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051868

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Author(s)

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Bouckou, Loemba

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Groeger, Philip

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Roy, Syamashree

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Journal

Proceedings of SPIE

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Acq. date: 2026-10-12