Publication:

Wafer Edge Defectivity and Its Correlation to Process Parameters

Date

2025

Proceedings Paper

https://doi.org/10.1117/12.3051868

Simple item page Full metadata Statistics

Author(s)

;

;

;

Bouckou, Loemba

;

;

;

;

;

;

;

;

Groeger, Philip

;

;

Roy, Syamashree

;

Journal

Proceedings of SPIE

Statistics

50 since deposited on 2025-07-31

4last month

1last week

Acq. date: 2026-08-09