Hotspot discovery and variability analysis for advanced EUV processes

Sah, Kaushik; Chen, Zhijin; Zhang, Yao; Zhang, Liming; Zhang, Cao; Higgins, Craig; Burov, Anatoly; Parsey, Guy; Vukkadala, Pradeep; Gronheid, Roel; Jain, Arpit; Ramini, Ramakanth; Agrawal, Ankur; Sharma, Garima; Cross, Andrew; Roy, Syamashree; Blanco, Victor

doi:10.1117/12.3011178

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Hotspot discovery and variability analysis for advanced EUV processes

Date

2024

Proceedings Paper

https://doi.org/10.1117/12.3011178

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Proceedings of SPIE

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Hotspot discovery and variability analysis for advanced EUV processes

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