Publication:

Hotspot discovery and variability analysis for advanced EUV processes

Date

2024
Proceedings Paper
https://doi.org/10.1117/12.3011178
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dc.contributor.authorSah, Kaushik
dc.contributor.authorChen, Zhijin
dc.contributor.authorZhang, Yao
dc.contributor.authorZhang, Liming
dc.contributor.authorZhang, Cao
dc.contributor.authorHiggins, Craig
dc.contributor.authorBurov, Anatoly
dc.contributor.authorParsey, Guy
dc.contributor.authorVukkadala, Pradeep
dc.contributor.authorGronheid, Roel
dc.contributor.authorJain, Arpit
dc.contributor.authorRamini, Ramakanth
dc.contributor.authorAgrawal, Ankur
dc.contributor.authorSharma, Garima
dc.contributor.authorCross, Andrew
dc.contributor.authorRoy, Syamashree
dc.contributor.authorBlanco, Victor
dc.contributor.imecauthorRoy, Syamashree
dc.contributor.imecauthorBlanco, Victor
dc.contributor.orcidimecRoy, Syamashree::0009-0009-3247-3252
dc.contributor.orcidimecBlanco, Victor::0000-0003-4308-0381
dc.date.accessioned2024-08-29T07:44:59Z
dc.date.available2024-06-15T17:25:54Z
dc.date.available2024-08-29T07:44:59Z
dc.date.embargo2024-04-09
dc.date.issued2024
dc.identifier.doi10.1117/12.3011178
dc.identifier.eisbn978-1-5106-7217-8
dc.identifier.isbn978-1-5106-7216-1
dc.identifier.issn0277-786X
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44054
dc.publisherSPIE-INT SOC OPTICAL ENGINEERING
dc.source.beginpageArt. 129553H
dc.source.conferenceConference on Metrology, Inspection, and Process Control XXXVIII
dc.source.conferencedateFEB 26-29, 2024
dc.source.conferencelocationSan Jose
dc.source.journalProceedings of SPIE
dc.source.numberofpages7
dc.source.volume12955
dc.title

Hotspot discovery and variability analysis for advanced EUV processes

dc.typeProceedings paper
dspace.entity.typePublication
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