Browsing by Author "Hill, C."
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Publication Characterisation of mechanical stresses of device isolation structures by micro-Raman spectroscopy and modelling
;Jones, S. K. ;Ahmed, M. ;Bazley, D. J. ;Beanland, R. J.; ;Hill, C.Rothwell, W. J.Proceedings paper1999, Analytical and Diagnostic Techniques for Semiconductor Materials, Devices, and Processes, 16/09/1999, p.60-75Publication The ADEQUAT project for development and transfer of 0.25µm logic complementary metal-oxide-semiconductor modules
; ; ;Félix, P. ;Haond, M. ;Hill, C. ;Janssen, G.Lorenz, J.Journal article1994, J. Vac. Sci. Technol. B, (12) 4, p.2852-2859Publication The STORM technology CAD system
;Lorenz, J. ;Hill, C. ;Jaouen, H. ;Lombardi, C. ;Lyden, C.; ;Pelka, J.Poncet, A.Journal article1995, Microelectronics Journal, (26) 2_3, p.113-135