Browsing by Author "Hodges, Blake"
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Publication Properties of NbxTi(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits
Journal article2024, SUPERCONDUCTOR SCIENCE & TECHNOLOGY, (37) 7, p.Art. 075012Publication Towards Enabling Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic: Fabrication, Characterization and Electrical Measurements of Superconducting NbxTi(1-x)N
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Two Metal Level Semi-Damascene Interconnects for Superconducting Digital Logic
Proceedings paper2024, 2024 International Interconnect Technology Conference, JUN 03-06, 2024