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Properties of NbxTi(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits
Publication:
Properties of NbxTi(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits
Date
2024
Journal article
https://doi.org/10.1088/1361-6668/ad4b61
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Perez Lozano, Daniel
;
Soulie, Jean-Philippe
;
Hodges, Blake
;
Piao, Xiaoyu
;
O'Neal, Sabine
;
Valente-Feliciano, Anne-Marie
;
Herr, Quentin
;
Tokei, Zsolt
;
Kim, Min-Soo
;
Herr, Anna
Journal
SUPERCONDUCTOR SCIENCE & TECHNOLOGY
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108
since deposited on 2024-06-25
Acq. date: 2025-10-26
Citations
Metrics
Views
108
since deposited on 2024-06-25
Acq. date: 2025-10-26
Citations