Publication:

Properties of NbxTi(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits

Date

2024
Journal article
https://doi.org/10.1088/1361-6668/ad4b61
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dc.contributor.authorPerez Lozano, Daniel
dc.contributor.authorSoulie, Jean-Philippe
dc.contributor.authorHodges, Blake
dc.contributor.authorPiao, Xiaoyu
dc.contributor.authorO'Neal, Sabine
dc.contributor.authorValente-Feliciano, Anne-Marie
dc.contributor.authorHerr, Quentin
dc.contributor.authorTokei, Zsolt
dc.contributor.authorKim, Min-Soo
dc.contributor.authorHerr, Anna
dc.contributor.imecauthorSoulie, Jean-Philippe
dc.contributor.imecauthorPiao, Xiaoyu
dc.contributor.imecauthorHerr, Quentin
dc.contributor.imecauthorTokei, Zsolt
dc.contributor.imecauthorKim, Min-Soo
dc.contributor.imecauthorHerr, Anna
dc.contributor.imecauthorPerez Lozano, Daniel
dc.contributor.imecauthorHodges, Blake
dc.contributor.imecauthorO'Neal, Sabine
dc.contributor.orcidimecSoulie, Jean-Philippe::0000-0002-5956-6485
dc.contributor.orcidimecPiao, Xiaoyu::0000-0002-2204-9636
dc.contributor.orcidimecHerr, Quentin::0000-0002-6864-2603
dc.contributor.orcidimecTokei, Zsolt::0000-0003-3545-3424
dc.contributor.orcidimecKim, Min-Soo::0000-0003-0211-0847
dc.contributor.orcidimecHerr, Anna::0000-0001-9247-0090
dc.contributor.orcidimecPerez Lozano, Daniel::0000-0003-3098-3266
dc.date.accessioned2025-07-08T08:25:21Z
dc.date.available2024-06-25T18:54:22Z
dc.date.available2025-07-08T08:25:21Z
dc.date.issued2024
dc.identifier.doi10.1088/1361-6668/ad4b61
dc.identifier.issn0953-2048
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/44092
dc.publisherIOP Publishing Ltd
dc.source.beginpageArt. 075012
dc.source.endpageN/A
dc.source.issue7
dc.source.journalSUPERCONDUCTOR SCIENCE & TECHNOLOGY
dc.source.numberofpages8
dc.source.volume37
dc.subject.keywordsTEMPERATURE
dc.title

Properties of NbxTi(1-x)N thin films deposited on 300 mm silicon wafers for upscaling superconducting digital circuits

dc.typeJournal article
dspace.entity.typePublication
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