Browsing by Author "Holmes, D."
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Publication Characterisation of plasma etch related residues formed on top of ECD Cu
Oral presentation1999, Advanced Metallization Conference; 28-30 September 1999; Orlando, FL, USA.Publication Characterisation of plasma etch releted residues formed on top of ECD Cu films
Proceedings paper2000, Advanced Metallization Conference 1999 - AMC 1999, 28/09/1999, p.615-619