Browsing by Author "Hopkins, Patrick E."
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Publication Changing the Face of Phase Change Memory with Sb2Te3/TiTe2 Superlattices
Proceedings paper2023, IEEE International Interconnect Technology Conference (IITC) / IEEE Materials for Advanced Metallization Conference (MAM), MAY 22-25, 2023Publication Thermal conductivity of underlayers for EUV lithography and its effect on sensitivity of metal oxide resist
Proceedings paper2025, 2025 Conference on Optical and EUV Nanolithography, 2025-04-22, p.1342416-1