Browsing by Author "Hopstaken, M."

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N-2 as carrier gas: an alternative to H-2 for enhanced epitaxy of Si, SiGe and SiGe:C

Meunier-Beillard, Philippe
;
Caymax, Matty
;
Van Nieuwenhuysen, Kris
;
Doumen, Geert
;
Brijs, Bert
Journal article
2004, Applied Surface Science, (224) 1_4, p.31-35
N2 as carrier gas: an alternative to H2 for enhanced epitaxy of Si, SiGe and SiGe:C

Meunier-Beillard, Philippe
;
Caymax, Matty
;
Van Nieuwenhuysen, Kris
;
Doumen, Geert
;
Brijs, Bert
Meeting abstract
2003, Abstracts Book ISTDM - 1st International SiGe Technology and Device Meeting, 15/01/2003, p.121-122