Publication:
N-2 as carrier gas: an alternative to H-2 for enhanced epitaxy of Si, SiGe and SiGe:C
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2076 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-10
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Metrics
Views
2076 since deposited on 2021-10-15
3last month
Acq. date: 2025-12-10
Citations