Browsing by Author "Hori, Masafumi"
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Publication Dual brush process for selective surface modification in graphoepitaxy directed self-assembly
Proceedings paper2017, Advances in Patterning Materials and Processes XXXIV, 26/02/2017, p.101460RPublication Dual brush process for selective surface modification in graphoepitaxy directed self-assembly
Journal article2017, Journal of Micro/Nanolithography MEMS and MOEMS, (16) 3, p.33503Publication Influence of block copolymer composition in grapho-epitaxy directed self-assembly for contact hole multiplication
Proceedings paper2016, 2nd International Symposium on DSA, 11/10/2016Publication Influence of homopolymer addition in templated assembly of cylindrical block copolymers
Journal article2019, ACS Nano, (13) 4, p.4073-4082Publication Photosensitized Chemically Amplified Resist (PSCAR) 2.0 for high-throughput and high-resolution EUV lithography: dual photosensitization of acid generation and quencher decomposition by flood exposure
Publication Viapatterning in the 7nm node using immersion lithography and graphoepitaxy directed self-assembly
Journal article2017, Journal of Micro/Nanolithography MEMS and MOEMS, (16) 2, p.23506