Browsing by Author "Hourdakis, E."

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Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films

Hourdakis, E.
;
Theodoropoulou, M.
;
Nassiopoulou, A.G.
;
Parisini, A.
;
Reading, M.A.
Proceedings paper
2009, Analytical Techniques for Semiconductor Materials and Process Characterization 6 - ALTECH, 4/10/2009, p.363-372
Comparison of electrical measurements with structural analysis of thin high-k hafnium-based films

Hourdakis, E.
;
Theodoropoulou, M.
;
Nassiopoulou, A.G.
;
Parisini, A.
;
Reading, M.A.
Meeting abstract
2009, 216th ECS Meeting, 4/10/2009, p.1995