Browsing by Author "Huddleston, Laura"
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Publication An experimental stitching study on the eve of High NA EUV
Proceedings paper2024-02-26, Optical and EUV Nanolithography XXXVII, 2024-02-26, p.129530JPublication Stitching for High NA: zooming in on CDU budget
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 1275002Publication Stitching insights towards high numerical aperture extreme ultraviolet lithography: an experimental study
Journal article2025-JAN 1, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (24) 1