Browsing by Author "Huet, K."
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Publication 3D sequential low temperature top tier devices using dopant activation with excimer laser anneal and strained silicon as performance boosters
Proceedings paper2020, IEEE Symposium on VLSI Technology and Circuits, JUN 15-19, 2020Publication Nickel silicide formation using excimer laser annealing
Proceedings paper2012, 2nd International Conference on Crystalline Silicon Photovoltaics - SiliconPV, 3/05/2012, p.503-509