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Nickel silicide formation using excimer laser annealing
Publication:
Nickel silicide formation using excimer laser annealing
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Date
2012
Proceedings Paper
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APA
Chicago
Harvard
IEEE
Basic data
APA
Chicago
Harvard
IEEE
Author(s)
Tous, Loic
;
Lerat, Jean-Francois
;
Emeraud, Thierry
;
Negru, R.
;
Huet, K.
;
Uruena De Castro, Angel
;
Aleman, Monica
;
Russell, Richard
;
John, Joachim
;
Poortmans, Jef
;
Mertens, Robert
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1886
since deposited on 2021-10-20
Acq. date: 2025-12-09
Citations
Metrics
Views
1886
since deposited on 2021-10-20
Acq. date: 2025-12-09
Citations