Browsing by Author "Huynh, Han Vinh"

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Digital Etching of Molybdenum Interconnects Using Plasma Oxidation

Erofeev, Ivan
;
Hartanto, Antony Winata
;
Khan, Muhaimin Mareum
;
Deng, Kerong
;
Kumar, Krishna
Journal article
2025, ADVANCED MATERIALS INTERFACES, (12) 1, p.Art. 2400558
Nanoscale Wet Etching of Molybdenum Interconnects with Organic Solutions

Deng, Kerong
;
Erofeev, Ivan
;
Chowdhuri, Angshuman Ray
;
Philipsen, Harold
;
Aabdin, Zainul
Journal article
2024, SMALL, (20) 51, p.Art. 2406713