Browsing by Author "Ignatova, V.A."
Now showing 1 - 4 of 4
- Results per page
- Sort Options
Publication Depth profiling of ZrO2/SiO2/Si stacks - a TOF-SIMS and computer simulation study
Journal article2004, Applied Surface Science, 231-232, p.603-608Publication Depth profiling of ZrO2/SiO2/Si stacks-a TOF-SIMS and computer simulation study
Proceedings paper2004-05, Proceedings of the 14th Int. Conference on Secondary Ion Mass Spectrometry and Related Topics - SIMS XIV, 14/09/2003, p.603-608Publication Depth profiling of ZrO2/SiO2/Si stacks-TOF-SIMS and computer simulation study
Meeting abstract2003, International Conference on Secondary Ion Mass Spectrometry - SIMS XIV, 14/09/2003, p.94Publication Interpretation of TOF-SIMS depth profiles from ultrashallow high-k dielectric stacks assisted by hybrid collisional computer simulation
Journal article2005-02, Applied Physics A, (81) 1, p.71-77