Browsing by Author "Ikota, M."
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Publication Inspection and metrology challenges for 3 nm node devices and beyond
; ; ; Proceedings paper2021, IEEE International Electron Devices Meeting (IEDM), DEC 11-16, 2021Publication Line profile measurement of advanced-FinFET features by reference metrology
Proceedings paper2015, Metrology, Inspection, and Process Control for Microlithography XXIX, 22/02/2015, p.942406