Browsing by Author "Ingolfsson, Oddur"

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Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography

Rathore, Ashish
;
Cipriani, Maicol
;
Huang, Ching-Chung
;
Amiaud, Lionel
;
Dablemont, Celine
Journal article
2021, PHYSICAL CHEMISTRY CHEMICAL PHYSICS, (23) 15, p.9228-9234
Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems

Rathore, Ashish
;
Pollentier, Ivan
;
Cipriani, Maicol
;
Singh, Harpreet
;
De Simone, Danilo
Journal article
2021, ACS APPLIED POLYMER MATERIALS, (3) 4, p.1964-1972