Browsing by Author "Ingolfsson, Oddur"

Electron-induced fragmentation mechanisms in organic monomers and their implications for photoresist optimization for EUV lithography

Extreme Ultraviolet-Printability and Mechanistic Studies of Engineered Hydrogen Silsesquioxane Photoresist Systems

Pathways to high-performance extreme ultra-violet lithography resists: Dissociative electron attachment to pentafluoro-phenyl triflate