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Browsing by Author "Jeon, J. S."

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    Analysis of high voltage TDDB measurements on Ta2O5/SiO2 stack

    Degraeve, Robin  
    ;
    Kaczer, Ben  
    ;
    Houssa, Michel  
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    Groeseneken, Guido  
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    Heyns, Marc  
    ;
    Jeon, J. S.
    Proceedings paper
    1999, International Electron Devices Meeting. Technical digest; December 1999; Washington, D.C., p.327-330
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    Electrical properties of metal-insulator-semiconductor devices with high permittivity gate dielectric layers

    Houssa, Michel  
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    Degraeve, Robin  
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    Heyns, Marc  
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    Kaczer, Ben  
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    Groeseneken, Guido  
    ;
    Naili, Mohamed
    Oral presentation
    2000, Semicon Europe
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    Electrical properties of thin SiON/Ta2O5 gate dielectric stacks

    Houssa, Michel  
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    Degraeve, Robin  
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    Mertens, Paul  
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    Heyns, Marc  
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    Jeon, J. S.
    ;
    Halliyal, A.
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    Ogle, B.
    Journal article
    1999, J. Appl. Phys., (86) 11, p.6462-6467
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    Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning

    Jeon, J. S.
    ;
    Ogle, B.
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    Baeyens, Martien
    ;
    Mertens, Paul  
    Oral presentation
    1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSS
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    Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning

    Jeon, J. S.
    ;
    Ogle, B.
    ;
    Baeyens, Martien
    ;
    Mertens, Paul  
    Proceedings paper
    1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.119-122

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