Browsing by Author "Jeon, J. S."
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Publication Analysis of high voltage TDDB measurements on Ta2O5/SiO2 stack
Proceedings paper1999, International Electron Devices Meeting. Technical digest; December 1999; Washington, D.C., p.327-330Publication Electrical properties of metal-insulator-semiconductor devices with high permittivity gate dielectric layers
Oral presentation2000, Semicon EuropePublication Electrical properties of thin SiON/Ta2O5 gate dielectric stacks
; ; ; ; ;Jeon, J. S. ;Halliyal, A.Ogle, B.Journal article1999, J. Appl. Phys., (86) 11, p.6462-6467Publication Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Oral presentation1998, 4th International Symposium on Ultra Clean Processing of Silicon Surfaces - UCPSSPublication Evaluation of cleaning recipes based on ozonated water for pre-gate oxide cleaning
Proceedings paper1999, Ultra Clean Processing of Silicon Surfaces; Proceedings of the 4th International Symposium on Ultra Clean Processing of Silicon, 21/09/1998, p.119-122