Browsing by Author "Jonas, A.M."
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Publication Characterization of the growth of atomic layer deposited WNxCy films on various substrates
Publication Growth and characterization of atomic layer deposited WCxNy
Publication Interface characterization of nanoscale laminate structures on dense dielectric substrates by x-ray reflectivity
Journal article2005-04, Virtual Journal of Nanoscale Science and Technology, (11) 16Publication Minimizing plasma damage and in situ sealing of ultra low-k dielectric films by using oxygen-free fluorocarbon plasma
Journal article2005, Journal of Vacuum Science and Technology B, (23) 5, p.2198-2202