Browsing by Author "Jonas, Alain"

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Comparison of modulus and density measurements by nanoidentation, SAWS, XRR and EP techniques of a porous low k MSQ dielectric

Abell, Thomas
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Iacopi, Francesca
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Prokopowicz, Greg
;
Sun, Brad
;
Mazurenko, Alex
Proceedings paper
2005-01, Advanced Metallization Conference 2004, 19/10/2004, p.457-462
Improved low-k dielectric properties using He/H2 plasma for resist removal

Urbanowicz, Adam
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Shamiryan, Denis
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Marsik, Premysl
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Travaly, Youssef
;
Jonas, Alain
Proceedings paper
2009, Advanced Metallization Conference 2008 (AMC 2008), 22/09/2008, p.593-598
Study of thermal stability of nickel silicide by x-ray reflectivity

Van Hove, Marleen
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Travaly, Youssef
;
Sajavaara, Timo
;
Brijs, Bert
;
Vandervorst, Wilfried
Journal article
2005, Microelectronic Engineering, (82) 3_4, p.492-496