Browsing by Author "Jozef, Peeters"
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Publication Ozone based atomic layer deposition of metal oxides: impact of N2/O2 supply ratio in ozone generation
Meeting abstract2010, 10th International Conference on Atomic Layer Deposition - AVS-ALD, 20/06/2010Publication Ozone-based metal oxide atomic layer deposition: impact of N2/O2 supply ratio in ozone generation
Journal article2010, Electrochemical and Solid-State Letters, (13) 6, p.H176-H178