Publication:
Ozone-based metal oxide atomic layer deposition: impact of N2/O2 supply ratio in ozone generation
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1919 since deposited on 2021-10-18
3last month
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Acq. date: 2026-04-06
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Statistics
Views
1919 since deposited on 2021-10-18
3last month
1last week
Acq. date: 2026-04-06
Citations