Publication:

Ozone-based metal oxide atomic layer deposition: impact of N2/O2 supply ratio in ozone generation

Date

2010
Journal article
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dc.contributor.authorDelabie, Annelies
dc.contributor.authorCaymax, Matty
dc.contributor.authorGielis, Sven
dc.contributor.authorMaes, Jan
dc.contributor.authorNyns, Laura
dc.contributor.authorPopovici, Mihaela Ioana
dc.contributor.authorSwerts, Johan
dc.contributor.authorTielens, Hilde
dc.contributor.authorJozef, Peeters
dc.contributor.authorVan Elshocht, Sven
dc.contributor.imecauthorDelabie, Annelies
dc.contributor.imecauthorCaymax, Matty
dc.contributor.imecauthorMaes, Jan
dc.contributor.imecauthorNyns, Laura
dc.contributor.imecauthorPopovici, Mihaela Ioana
dc.contributor.imecauthorSwerts, Johan
dc.contributor.imecauthorTielens, Hilde
dc.contributor.imecauthorVan Elshocht, Sven
dc.contributor.orcidimecNyns, Laura::0000-0001-8220-870X
dc.contributor.orcidimecVan Elshocht, Sven::0000-0002-6512-1909
dc.date.accessioned2021-10-18T15:58:46Z
dc.date.available2021-10-18T15:58:46Z
dc.date.issued2010
dc.identifier.issn1099-0062
dc.identifier.urihttps://imec-publications.be/handle/20.500.12860/17003
dc.source.beginpageH176
dc.source.endpageH178
dc.source.issue6
dc.source.journalElectrochemical and Solid-State Letters
dc.source.volume13
dc.title

Ozone-based metal oxide atomic layer deposition: impact of N2/O2 supply ratio in ozone generation

dc.typeJournal article
dspace.entity.typePublication
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