Browsing by Author "Juncker, Aurélie"
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Publication BEOL compatible WS2 transistors fully fabricated in a 300 mm pilot line
Proceedings paper2017, Silicon Nanoelectronics Workshop - SNW, 4/07/2017, p.139-140Publication Modeling of tone inversion process flow for N5 interconnect to characterize block tip to tip
Proceedings paper2017, IEEE International Interconnect Technology Conference - IITC, 16/05/2017, p.1-3Publication WS2 transistors on 300 mm wafers with BEOL compatibility
Proceedings paper2017, 47th European Solid-State Device Research Conference - ESSDERC, 11/09/2017, p.212-215