Browsing by Author "Kang, S."
Now showing 1 - 2 of 2
- Results per page
- Sort Options
Publication Better prediction on patterning failure mode with hotspot aware OPC modeling
Proceedings paper2021, Metrology, Inspection, and Process Control for Microlithography XXXIV, 22/02/2021, p.1161112Publication Massive metrology of 2D logic patterns on BEOL EUVL
Proceedings paper2020, Metrology, Inspection, and Process Control for Microlithography XXXIV, 23/03/2020, p.113250J