Publication:

Massive metrology of 2D logic patterns on BEOL EUVL

Date

2020
Proceedings Paper
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Author(s)

Das, Sayantan  
;
Kang, S.
;
Halder, Sandip  
;
Maruyama, K.
;
Leray, Philippe  
;
Yamazaki, Y.

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Abstract

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1939 since deposited on 2021-10-28
Acq. date: 2026-01-26

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1939 since deposited on 2021-10-28
Acq. date: 2026-01-26

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