Browsing by Author "Kashiwagi, Yusaku"
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Publication ALD of Al2O3 for carbon nanotube vertical interconnect and its impact on the electrical properties
Proceedings paper2011, Carbon-Based Electronic Devices. Processing, Performance and Reliabilty, 29/11/2010, p.mrsf10-1283-b10Publication Characterization of carbon nanotubes based vertical interconnects
Proceedings paper2012, International Conference on Solid State Devices and Materials - SSDM, 25/09/2012, p.648-649Publication Electrical and structural characterization of 150 nm CNT contacts with Cu damascene top metallization
Proceedings paper2012, IEEE International Interconnect Technology Conference - IITC, 4/06/2012Publication Electrical characterization of CNT contacts with Cu damascene top contact
Journal article2013, Microelectronic Engineering, 106, p.106-111Publication Electron mean-free path for CNT in vertical interconnects approaches Cu
Proceedings paper2014, IEEE International Interconnect Technology Conference - IITC, 20/05/2014, p.181-184Publication Measuring the electrical resistivity and contact resistance of vertical carbon nanotube bundles for application as interconnects
Journal article2011, Nanotechnology, (22) 8, p.85302Publication Wafer level electrical evaluation of vertical carbon nanotube bundles as a function of the growth temperature
Journal article2013, Japanese Journal of Applied Physics, (52) 4, p.04CN02