Browsing by Author "Kato, Kodai"
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Publication Functional underlayers for dose reduction and collapse mitigation in EUV lithography: a factorial analysis
Proceedings paper2023, International Conference on Extreme Ultraviolet Lithography, OCT 02-05, 2023, p.Art. 27500IPublication Mitigating pattern collapse in high-resolution extreme ultraviolet lithography using the organic dry development rinse process
Journal article2024, JOURNAL OF MICRO-NANOPATTERNING MATERIALS AND METROLOGY-JM3, (23) 3, p.Art. 034603