Publication:
Mitigating pattern collapse in high-resolution extreme ultraviolet lithography using the organic dry development rinse process
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146 since deposited on 2024-10-12
6last month
Acq. date: 2026-02-24
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Statistics
Views
146 since deposited on 2024-10-12
6last month
Acq. date: 2026-02-24
Citations